Clean room with three different work areas (ISO 5, ISO 6 and ISO 7, which houses a Micro and Nanofabrication laboratory. Surrounded by side areas and technical corridors with auxiliary equipment, it has clean work areas, with pressure control, air flow, temperature and humidity control.The clean room also has intakes for eight different technical gases (O2, Ar, He, N2, C4F8, SF6, CF4 and compressed air), as well as an extraction cabinet for gases and a compression system.
Manufacturer: Eco-Fred Rubi S.L.
Location: UPNA. Edificio del Sario. Campus de Arrosadia. 31006 Pamplona